Hoʻolālā ʻia ka Aluminum Mirror Inline Magnetron Sputtering Line no ka puka kiʻekiʻe o ke kumu hana aniani aniani.I mea e ʻaʻahu ai i ke aniani ʻoi aku ka nui a me ka mālama ʻana i ka pā aniani palupalu, ʻoi aku hoʻi no nā pepa nui, hana maʻamau mākou i ke ʻano o ka laina sputtering.He laina hoʻopaʻa magnetron mau ia, me ka mua a me ka hope o ke keʻena hoʻoheheʻe ʻino, a ma hope o ke keʻena hoʻololi, ma mua a ma hope o ke keʻena pumping maikaʻi, kahi keʻena paʻa, keʻena pale kala.
ʻO ka hoʻolālā pahuhopu: nā cathodes e hoʻoheheʻe ana i ka magnetron cylindrical a i ʻole nā cathodes planar.
Puna mana: lako mana me ka mana kiʻekiʻe DC a i ʻole MF magnetron sputtering
Pūnaehana hoʻokele: kaʻa huila, hiki ke hoʻololi ʻia, ʻōnaehana wehe puka lumi ʻano induction.
Pūnaehana hoʻoheheʻe: pauma diffusion (a i ʻole turbo molecular pump) + pauma aʻa + pama mīkini