Mīkini Sputtering Magetron
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Vacuum thin film magnetron sputtering coatingng mīkini
ʻO ka ʻenehana hoʻoheheʻe ʻana i ka vacuum magnetron ka hoʻohana ʻana i ka wahine, bipolar electrode surface me ke kahua magnetic o ka electron i loko o ka cathode surface drift, ma ka hoʻonohonoho ʻana i ka pā uila e kū pono ana i ka māla magnetic, hoʻonui ka electron i ka hahau, hoʻonui i ka helu o ka ionization. o ke kinoea, oiai ka kiʻekiʻe-ikena particles kinoea a lilo ka ikehu ma hope o ka collision a no laila haʻahaʻa substrate wela, piha ka uhi ma luna o ka mea wela ole.
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Pūnaehana hoʻoheheʻe ʻana i ka magnetron
ʻO ka ʻōnaehana hoʻoheheʻe ʻana o ka vacuum deposition magnetron he ʻano mea lako e hiki ke hoʻohana ʻia no ka hoʻopili ʻana i nā ʻāpana ʻoniʻoni ʻoniʻoni ʻoniʻoni ma luna o nā mea maka me nā mea metala a i ʻole nā mea hana.
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ʻO ka mīkini hoʻoheheʻe ʻana i ka Magnetron no nā ʻoki ʻoki ʻokiʻoki
ʻO ka Magnetron sputtering kahi ʻenehana hoʻopaʻa kiʻi ʻoniʻoni lahilahi i hoʻohana nui ʻia i kēia manawa.Me ka hoʻomau mau ʻana o ka ʻenehana sputtering a me ka ʻimi ʻana i nā kiʻiʻoniʻoni hana hou, ua hoʻonui ʻia ka noi o ka magnetron sputtering i nā ʻano hana hana a me ka noiʻi ʻepekema.Ma ke ʻano he ʻenehana uhi ʻole wela i ke kula o ka microelectronics, hoʻohana nui ʻia ia i ka deposition kemika (CVD) a i ʻole ka hoʻoheheʻe ʻana i ka mahu (MOCVD) e waiho i nā kiʻiʻoniʻoni lahilahi o nā mea paʻakikī e ulu a kūpono ʻole, a hiki ke loaʻa. nā kiʻiʻoniʻoni lahilahi loa ma nā wahi nui.
